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W18Cr4V高速鋼滲鉻熱處理對HFCVD金剛石膜生長的影響
發(fā)布人：上海艾荔艾金屬材料有限公司www.bt990.com.cn
更新時(shí)間：2015-12-05
采用熱絲化學(xué)沉積法在W18Cr4V高速鋼基體上沉積金剛石薄膜。為了減少石墨的形成、增強(qiáng)膜基結(jié)合強(qiáng)度，沉積前先使用滲鉻熱處理在高速鋼表面制備一層碳化鉻中間層。采用場發(fā)射掃描電子顯微鏡、X射線衍射儀、激光拉曼光譜和洛氏硬度計(jì)對滲鉻基體和金剛石膜進(jìn)行檢測分析，研究滲鉻熱處理對高速鋼基體與金剛石膜的物相組織、結(jié)構(gòu)形貌和附著性能的影響。
W18Cr4V高速鋼滲鉻熱處理對HFCVD金剛石膜生長的影響Effect of high temperature diffusion chromizing pretreatment of?W18Cr4V high-speed steel on growth of diamond films by HFCVD
采用熱絲化學(xué)沉積法在高速鋼基體上沉積金剛石薄膜。為了減少石墨的形成、增強(qiáng)膜基結(jié)合強(qiáng)度，沉積前先使用滲鉻熱處理在高速鋼表面制備一層碳化鉻中間層。采用場發(fā)射掃描電子顯微鏡、X射線衍射儀、激光拉曼光譜和洛氏硬度計(jì)對滲鉻基體和金剛石膜進(jìn)行檢測分析，研究滲鉻熱處理對高速鋼基體與金剛石膜的物相組織、結(jié)構(gòu)形貌和附著性能的影響。結(jié)果表明：滲鉻熱處理能在鋼基表面形成一層致密的富Cr層，此過渡層能有效提高金剛石的形核率，在滲鉻鋼基表面形成連續(xù)致密的高質(zhì)量金剛石膜，但該金剛石膜的應(yīng)力較大，1 471N載荷的壓痕測試導(dǎo)致薄膜嚴(yán)重破壞，說明膜基結(jié)合強(qiáng)度有待進(jìn)一步提高。
Diamond films were grown on high-speed steel substrates by hot filament chemical vapour deposition (HFCVD) method. A chromium carbide coating prepared by high temperature diffusion chromizing pretreatment was used as an intermediate layer on the steel substrates to minimize the early formation of graphite and to enhance the diamond film adhesion. The characteristics of the chromizing pretreated high-speed steel and the diamond films were analyzed by X-ray diffractometer (XRD), field emission scanning electron microscope (FE-SEM), micro-Raman spectroscope and Rockwell hardness indentation to investigate the effects of chromizing pretreatment on the morphology, structure and adhesion of the substrate and diamond films. The results show that chromizing high speed steel results in the formation of a Cr-rich layer on the substrate surface, which leads to a much improved nucleation density, and formation of smooth, dense, good quality , diamond films, but the thermal stress of diamond films is large, Rockwell indentation testing with 1 471N shows serious damage, implying that the adhesion of these films is not good enough.
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